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Fabrication of a glass-implemented microcapillary electrophoresis device with integrated contactless conductivity detection
journal contribution
posted on 2023-05-26, 11:38 authored by Berthold, A, Laugere, F, Schellevis, H, de Boer, CR, Laros, M, Rosanne Guijt, Sarro, PM, Vellekoop, MJGlass microdevices for capillary electrophoresis (CE) gained a lot of interest in the development of micrototal analysis systems (˜í¬¿TAS). The fabrication of a ˜í¬¿JAS requires integration of sampling, chemical separation and detection systems into a microdevice. The integration of a detection system into a microchannel, however, is hampered by the lack of suitable microfabrication technology. Here, a microfabrication method for integration of insulated microelectrodes inside a leakage-free microchannel in glass is presented. A combination of newly developed technological approaches, such as low-temperature glass-to-glass anodic bonding, channel etching, fabrication of buried metal interconnects, and deposition of thin plasma-enhanced chemical vapour deposition (PECVD) silicon carbide layers, enables the fabrication of a CE microdevice with an integrated contactless conductivity detector. The fabrication method of this CE microdevice with integrated contactless conductivity detector is described in detail. Standard CE separations of three inorganic cations in concentrations down to 5 ˜í¬¿m show the viability of the new ˜í¬¿CE system.
History
Publication title
ElectrophoresisVolume
23Article number
20Number
20Pagination
3511-3519ISSN
0173-0835Publication status
- Published
Rights statement
Copyright 2002 WILEY-VCH Verlag GmbH & Co. KGaA, WeinheimRepository Status
- Restricted
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